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Nanoindentation Analysis of Mechanical Properties of Low to Ultralow Dielectric Constant SiCOH Films
Wang, Lugen, Ganor, M., Rokhlin, S.I., Grill, AlfredVolume:
20
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.2005.0258
Date:
August, 2005
File:
PDF, 3.61 MB
english, 2005