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SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Device and Process Technologies for MEMS and Microelectronics - Ultralow-stress silicon-rich nitride films for microstructure fabrication
Cheng, MingCheng, Ho, Wei-Gei, Chang, Chin P., Huang, Wen S., Huang, Ruey-Shing S., Chau, Kevin H., Dimitrijev, SimaVolume:
3892
Year:
1999
Language:
english
DOI:
10.1117/12.364478
File:
PDF, 897 KB
english, 1999