A novel Cu(II) chemical vapor deposition precursor:...

Journal of Materials Research 1998 / 3 Vol. 13; Iss. 3

A novel Cu(II) chemical vapor deposition precursor: Synthesis, characterization, and chemical vapor deposition

Devi, Anjana, Goswami, J., Lakshmi, R., Shivashankar, S. A., Chandrasekaran, S.
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Volume:
13
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1998.0086
Date:
March, 1998
File:
PDF, 209 KB
english, 1998
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