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Laser Pulsed Induced Microwave Conductivity and Spectroscopic Ellipsometry Characterization of Helium and Hydrogen Plasma Damage of the Crystalline Silicon Surface
Neitzert, H.C., Layadi, N., Roca i Cabarrocas, Pere, Vanderhaghen, R., Kunst, M.Volume:
173-174
Year:
1995
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.173-174.209
File:
PDF, 407 KB
1995