Effects of annealing on the structure and electrical conductivity of CVD alumina films
Wong, A. S., Michal, G. M., Locci, I. E., Cheung, P. W.Volume:
3
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1988.1002
Date:
October, 1988
File:
PDF, 6.36 MB
english, 1988