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Hydrogen silsesquioxane mold coatings for improved replication of nanopatterns by injection molding
Hobæk, Thor Christian, Matschuk, Maria, Kafka, Jan, Pranov, Henrik J, Larsen, Niels BVolume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/3/035018
Date:
March, 2015
File:
PDF, 929 KB
english, 2015