Crystal Quality Evaluation of 6H-SiC Layers Grown by Liquid Phase Epitaxy around Micropipes using Micro-Raman Scattering Spectroscopy
Ujihara, Toru, Munetoh, S., Kusunoki, Kazuhiko, Kamei, Kazuhito, Usami, N., Fujiwara, K., Sazaki, G., Nakajima, KazuoVolume:
457-460
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.457-460.633
File:
PDF, 623 KB
english, 2004