![](/img/cover-not-exists.png)
Comparison of SiC Epitaxial Growth from Dichlorosilane and Tetrafluorosilane Precursors
Song, H., Rana, T., Chandrashekhar, M. V. S., Omar, S. U., Sudarshan, T. S.Volume:
58
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/05804.0097ecst
Date:
August, 2013
File:
PDF, 29 KB
english, 2013