Comparison of SiC Epitaxial Growth from Dichlorosilane and...

Comparison of SiC Epitaxial Growth from Dichlorosilane and Tetrafluorosilane Precursors

Song, H., Rana, T., Chandrashekhar, M. V. S., Omar, S. U., Sudarshan, T. S.
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Volume:
58
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/05804.0097ecst
Date:
August, 2013
File:
PDF, 29 KB
english, 2013
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