Improvement of Mesa-Sidewall Leakage Current Using...

Japanese Journal of Applied Physics 2005 / 4 Vol. 44; Iss. 4B

Improvement of Mesa-Sidewall Leakage Current Using Benzocyclobuten Sidewall Process in InGaAs/InP MSM Photodetector

Chiu, Wei-Yu, Huang, Fan-Hsiu, Wu, Yen-Shian, Lin, Don-Ming, Chan, Yi-Jen, Chen, Shu-Han, Chyi, Jen-Inn, Shi, Jin-Wei
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Volume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.2586
Date:
April, 2005
File:
PDF, 162 KB
english, 2005
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