Hot-Wire Generated Atomic Hydrogen and its Impact on...

ECS Journal of Solid State Science and Technology 2013 / 02 Vol. 2; Iss. 4

Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl4/NH3 System

Van Bui, H., Kovalgin, A. Y., Aarnink, A. A. I., Wolters, R. A. M.
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Volume:
2
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.015304jss
Date:
February, 2013
File:
PDF, 1.45 MB
english, 2013
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