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Single Crystal Si Layers on Glass Fabricated by Hydrophilic Fusion Bonding and Smart-Cut Technology
Wan-Bao, Zhen, Wei-Li, Liu, Zhi-Tang, Song, Song-Lin, Feng, Shi-Fu, Zhu, Bei-Jun, ZhaoVolume:
21
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/21/12/061
Date:
December, 2004
File:
PDF, 302 KB
english, 2004