FERROELECTRIC THIN FILM SYSTEM IN PACKAGE DEVICES WITH INTEGRATED CAPACITORS OF 100 nF/mm2 & BREAKDOWN VOLTAGES OF 90 V
Klee, Mareike, Keur, Wilco, Mauczok, Ruediger, Roest, Aarnoud, Reimann, Klaus, Peters, Linda, Neumann, Kai, Kiewitt, RainerVolume:
1034
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1034-K11-08
Date:
January, 2007
File:
PDF, 559 KB
english, 2007