Spin-on n-Type Silicon Films Using Phosphorous-doped...

Japanese Journal of Applied Physics 2007 / 9 Vol. 46; Iss. No. 36

Spin-on n-Type Silicon Films Using Phosphorous-doped Polysilanes

Tanaka, Hideki, Iwasawa, Haruo, Wang, Daohai, Toyoda, Naoyuki, Aoki, Takashi, Yudasaka, Ichio, Matsuki, Yasuo, Shimoda, Tatsuya, Furusawa, Masahiro
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.L886
Date:
September, 2007
File:
PDF, 86 KB
english, 2007
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