Local Strain Distribution in AlN Thick Films Analyzed by...

Materials Science Forum 2014 / 5 Vol. 783-786

Local Strain Distribution in AlN Thick Films Analyzed by X-Ray Microdiffraction

Khan, Dinh Thanh, Takeuchi, Shotaro, Nakamura, Yoshiaki, Miyake, Hideto, Hiramatsu, Kazumasa, Imai, Yoshihiko, Kimura, Shigeru, Sakai, Akira
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Volume:
783-786
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.783-786.2016
Date:
May, 2014
File:
PDF, 619 KB
english, 2014
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