Ab Initio Studies of the Surface Reaction of Si2C and SiC2...

Materials Science Forum 2006 Vol. 527-529

Ab Initio Studies of the Surface Reaction of Si2C and SiC2 with Si on the 4H-SiC (000-1) Surface

Yamaguchi, Hiroki, Sakiyama, Yukinori, Makino, Emi, Onda, Shoichi, Matsumoto, Yoichiro
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Volume:
527-529
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.527-529.235
File:
PDF, 374 KB
english, 2006
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