Plasma Characteristics Related to Thin-Film Microstructures...

Plasma Characteristics Related to Thin-Film Microstructures in Unbalanced Magnetron Sputtering Processes

Rohde, S.L.
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Volume:
102-104
Year:
1992
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.102-104.563
File:
PDF, 751 KB
english, 1992
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