Cathodoluminescence of Defect Regions in SiC Epi-Films

Cathodoluminescence of Defect Regions in SiC Epi-Films

MacMillan, Mike F., Hultman, L., Hallin, Christer, Ivanov, I.G., Henry, Anne, Janzén, Erik, Galloway, S.A.
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Volume:
264-268
Year:
1998
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.264-268.653
File:
PDF, 388 KB
1998
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