Silicon Surface Defects: The Roles of Passivation and...

Materials Science Forum 1997 Vol. 258-263

Silicon Surface Defects: The Roles of Passivation and Surface Contamination

Reddy, Anand J., Burr, Tracey A., Chan, Julia K., Norga, Gerd J., Michel, Jürgen, Kimerling, Lionel C.
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Volume:
258-263
Year:
1997
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.258-263.1719
File:
PDF, 390 KB
1997
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