Resistivity of Heavily Doped Polycrystalline Silicon...

Japanese Journal of Applied Physics 1995 / 4 Vol. 34; Iss. Part 1, No

Resistivity of Heavily Doped Polycrystalline Silicon Subjected to Furnace Annealing

Suzuki, Kunihiro, Miyata, Noriyuki, Kawamura, Kazuo
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Volume:
34
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.34.1748
Date:
April, 1995
File:
PDF, 767 KB
1995
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