A wet abrasive blasting process for smooth micromachining of glass by ductile-mode removal
Mineta, Takashi, Takada, Takehisa, Makino, Eiji, Kawashima, Takahiro, Shibata, TakayukiVolume:
19
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/19/1/015031
Date:
January, 2009
File:
PDF, 1.63 MB
english, 2009