Validation of a single fibre-fed heterodyne laser interferometer with nanometre uncertainty
B.A.W.H. Knarren, S.J.A.G. Cosijns, H. Haitjema, P.H.J. SchellekensVolume:
29
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.precisioneng.2004.09.003
File:
PDF, 221 KB
english, 2005