Nanometer edge profile measurement of diamond cutting tools...

Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor

Wei Gao, Takenori Motoki, Satoshi Kiyono
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Volume:
30
Year:
2006
Language:
english
Pages:
10
DOI:
10.1016/j.precisioneng.2005.11.008
File:
PDF, 1.32 MB
english, 2006
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