Development of velocity sensor with high frequency band and its application to a vibration isolate table
Shinji Wakui, Azusa Noda, Takeshi Akiyama, Masato TakahashiVolume:
31
Year:
2007
Language:
english
Pages:
10
DOI:
10.1016/j.precisioneng.2006.05.004
File:
PDF, 1.57 MB
english, 2007