System identification of a dual-stage XY precision...

Precision Engineering 2009 Vol. 33; Iss. 1

System identification of a dual-stage XY precision positioning table

Rong-Fong Fung, Yi-Lung Hsu, Ming-Shyan Huang
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Volume:
33
Year:
2009
Language:
english
Pages:
10
DOI:
10.1016/j.precisioneng.2008.04.002
File:
PDF, 1.75 MB
english, 2009
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