Uncertainty contribution of tip-sample angle to AFM lateral measurements
H. González-Jorge, M.A. Fernández-López, J.L. Valencia, S. TorresVolume:
35
Year:
2011
Language:
english
Pages:
9
DOI:
10.1016/j.precisioneng.2010.08.001
File:
PDF, 1.92 MB
english, 2011