Basic investigation of noncontact transportation system for...

Precision Engineering 2011 Vol. 35; Iss. 1

Basic investigation of noncontact transportation system for large TFT-LCD glass sheet used in CCD inspection section

Kazuki Amano, Shigeka Yoshimoto, Masaaki Miyatake, Takuya Hirayama
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Volume:
35
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.precisioneng.2010.08.010
File:
PDF, 1.57 MB
english, 2011
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