The effect of parasitic boron doping on P-type piezoresistors
M. Olszacki, C. Maj, M. Al Bahri, P. Pons, J-C. Marrot, A. NapieralskiVolume:
1
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.proche.2009.07.011
File:
PDF, 169 KB
english, 2009