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Microspectrometer with a concave grating fabricated in a MEMS technology
S. Grabarnik, A. Emadi, H. Wu, G. de Graaf, R.F. WolffenbuttelVolume:
1
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.proche.2009.07.100
File:
PDF, 193 KB
english, 2009