Compact High-Speed Spectrometers Based on MEMS Devices with...

Procedia Chemistry 2009 Vol. 1; Iss. 1

Compact High-Speed Spectrometers Based on MEMS Devices with Large Amplitude In-Plane Actuators

A. Kenda, A. Frank, M. Kraft, A. Tortschanoff, T. Sandner, H. Schenk, W. Scherf
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Volume:
1
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.proche.2009.07.139
File:
PDF, 576 KB
english, 2009
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