A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam...

Procedia Chemistry 2009 Vol. 1; Iss. 1

A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators

Kah How Koh, Takeshi Kobayashi, Fu-Li Hsiao, Chengkuo Lee
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Volume:
1
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.proche.2009.07.325
File:
PDF, 240 KB
english, 2009
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