Donor passivation in pseudomorphic-high electron mobility transistors due to plasma-incorporated fluorine impurities observed using x-ray photoemission spectroscopy
Uchiyama, Hiroyuki, Kikawa, Takeshi, Taniguchi, Takafumi, Shiota, TakashiVolume:
21
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2006.0159
Date:
May, 2006
File:
PDF, 174 KB
english, 2006