Effects of Current Waveform and Bath Temperature on Surface Morphology and Texture of Copper Electrodeposits for ULSI
Lee, Hyo Jong, Lee, Dong NyungVolume:
408-412
Year:
2002
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.408-412.1657
File:
PDF, 597 KB
2002