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[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Local Removal Frequency of Nano Particles in Megasonic Cleaning
Janssens, Tom, Wostyn, Kurt L., Arnauts, Sophia, De Geyter, Annelies, Bearda, Twan, Mertens, P.Volume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2779398
File:
PDF, 511 KB
english, 2007