Stability of AZO Thin Films under the Environment of...

Advanced Materials Research 2011 / 2 Vol. 194-196

Stability of AZO Thin Films under the Environment of Hydrogen Plasma

Zhao, Qing Nan, Yuan, Wen Hui, Liang, Hong Yu, Wang, Wei Yuan, Yang, Pu Lei, Dong, Yu Hong
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Volume:
194-196
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.194-196.2334
Date:
February, 2011
File:
PDF, 604 KB
english, 2011
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