Flip chip MEMS microphone package with large acoustic reference volume
Gregor Feiertag, Wolfgang Pahl, Matthias Winter, Anton Leidl, Stefan Seitz, Christian Siegel, Andreas BeerVolume:
5
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.proeng.2010.09.121
File:
PDF, 356 KB
english, 2010