Ultra low power flow-to-frequency SOI MEMS transducer

Procedia Engineering 2010 Vol. 5; Iss. none

Ultra low power flow-to-frequency SOI MEMS transducer

N. André, B. Rue, D. Van Vynckt, L.A. Francis, D. Flandre, J.-P. Raskin
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
5
Year:
2010
Pages:
4
DOI:
10.1016/j.proeng.2010.09.166
File:
PDF, 5.30 MB
2010
Conversion to is in progress
Conversion to is failed