A 3-D MEMS VOA using translational attenuation mechanism...

Procedia Engineering 2010 Vol. 5; Iss. none

A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators

Kah How Koh, Chengkuo Leea, Takeshi Kobayashi
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Volume:
5
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.proeng.2010.09.184
File:
PDF, 644 KB
english, 2010
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