Design and characterization of the immersion-type capacitive ultrasonic sensors fabricated in a CMOS process
Po-Kai Tang, Po-Hsun Wang, Meng-Lin Li, Michael S.-C. LuVolume:
5
Year:
2010
Pages:
4
DOI:
10.1016/j.proeng.2010.09.198
File:
PDF, 6.32 MB
2010