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Contactless electromagnetic switched interrogation of micromechanical cantilever resonators
Marco Baù, Vittorio Ferrari, Daniele Marioli, Emanuele TonoliVolume:
5
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.proeng.2010.09.285
File:
PDF, 598 KB
english, 2010