Characterization of a pull-in based -resolution...

Procedia Engineering 2010 Vol. 5; Iss. none

Characterization of a pull-in based -resolution accelerometer

Rosana A. Dias, Edmond Cretu, Reinoud Wolffenbuttel, Luis A. Rocha
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Volume:
5
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.proeng.2010.09.296
File:
PDF, 601 KB
english, 2010
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