A CMOS-MEMS accelerometer with tri-axis sensing electrodes...

Procedia Engineering 2010 Vol. 5; Iss. none

A CMOS-MEMS accelerometer with tri-axis sensing electrodes arrays

Ming-Han Tsai, Yu-Chia Liu, Chih-Ming Sun, Chuanwei Wang, Weileun Fang
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Volume:
5
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.proeng.2010.09.298
File:
PDF, 599 KB
english, 2010
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