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Micro Pirani vacuum gauges manufactured by a film transfer process
G. Schelcher, E. Lefeuvre, S. Brault, F. Parrain, E. Martincic, E. Dufour-Gergam, A. BosseboeufVolume:
5
Year:
2010
Pages:
4
DOI:
10.1016/j.proeng.2010.09.311
File:
PDF, 6.12 MB
2010