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The effect of thermoelastic damping on the total Q-factor of stateof-the-art MEMS gyroscopes with complex beam-like suspensions
T. Künzig, M. Niessner, G. Wachutka, G. Schrag, H. HammerVolume:
5
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.proeng.2010.09.351
File:
PDF, 389 KB
english, 2010