Determination of the Thickness and Optical Constants of ZrO2 by Spectroscopic Ellipsometry and Spectrophotometric Method
R. Yusoh, M. Horprathum, P. Eiamchai, S. Chanyawadee, K. AiempanakitVolume:
8
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.proeng.2011.03.041
File:
PDF, 406 KB
english, 2011