Optimized Deep UV Curing Process for Metal-Free Dry-Etching of Critical Integrated Optical Devices
Sengo, G., van Wolferen, H. A. G. M., Driessen, A.Volume:
158
Year:
2011
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3623584
File:
PDF, 929 KB
english, 2011