Optimized Deep UV Curing Process for Metal-Free Dry-Etching...

Optimized Deep UV Curing Process for Metal-Free Dry-Etching of Critical Integrated Optical Devices

Sengo, G., van Wolferen, H. A. G. M., Driessen, A.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
158
Year:
2011
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3623584
File:
PDF, 929 KB
english, 2011
Conversion to is in progress
Conversion to is failed