Low Temperature High Quality Growth of Silicon-Dioxide...

MRS Proceedings 2007 / 1 Vol. 989

Low Temperature High Quality Growth of Silicon-Dioxide Using Oxygenation of Hydrogenation-Assisted Nano-Structured Silicon Thin Films

Rouhi, Nima, Esfandyarpour, Behzad, Mohajerzadeh, Shams, Hashemi, Pouya, Hekmat-Shoar, Bahman, Robertson, Michael D.
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Volume:
989
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0989-A05-08
Date:
January, 2007
File:
PDF, 280 KB
english, 2007
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