Performance evaluation of a water mist system in...

Process Safety and Environmental Protection 2008 Vol. 86; Iss. 3

Performance evaluation of a water mist system in semiconductor wet bench fires

Wen-Yao Chang, Ping-Kun Fu, Chiun-Hsun Chen, Yi-Liang Shu
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Volume:
86
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.psep.2007.10.013
File:
PDF, 514 KB
english, 2008
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