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Characterization of sputtered W–Si–N thin films by a monoenergetic positron beam
S. Mariazzi, C. Macchi, E. Boscolo Marchi, G.P. Karwasz, R.S. BrusaVolume:
76
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.radphyschem.2006.03.037
File:
PDF, 166 KB
english, 2007