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Properties of Silicon Film in a Silicon-on-Glass Structure
Kilanov, D.V., Antonova, I.V., Safronov, L.N., Popov, V.P., Obodnikov, V.I., Spesivtsev, E.V.Volume:
82-84
Year:
2002
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.82-84.503
File:
PDF, 333 KB
2002