Properties of Silicon Film in a Silicon-on-Glass Structure

Kilanov, D.V., Antonova, I.V., Safronov, L.N., Popov, V.P., Obodnikov, V.I., Spesivtsev, E.V.

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Volume:

82-84

Year:

2002

Journal:

Solid State Phenomena

DOI:

10.4028/www.scientific.net/SSP.82-84.503

File:

PDF, 333 KB

2002

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