Effect of High Temperature Oxidation of 4H-SiC on the...

Materials Science Forum 2009 Vol. 615-617

Effect of High Temperature Oxidation of 4H-SiC on the Near-Interface Traps Measured by TDRC

Allerstam, Fredrik, Sveinbjörnsson, Einar Ö.
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Volume:
615-617
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.615-617.537
File:
PDF, 601 KB
english, 2009
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